Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177845 | Method and apparatus for thermally processing plastic discs, in particular mould wafers | — | 2015-11-03 |
| 7900373 | Method for conditioning semiconductor wafers and/or hybrids | — | 2011-03-08 |
| 7271604 | Method and apparatus for testing semiconductor wafers by means of a temperature-regulated chuck device | — | 2007-09-18 |
| 5220277 | Arrangement for testing semiconductor wafers or the like | — | 1993-06-15 |