Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879233 | Electrostatic chuck with polymer protrusions | Richard A. Cooke, Steven Donnell, Mark W. Vose, Yan Liu | 2014-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879233 | Electrostatic chuck with polymer protrusions | Richard A. Cooke, Steven Donnell, Mark W. Vose, Yan Liu | 2014-11-04 |