Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149201 | Silicon nitride layer etching composition | Dong Hyun Kim, Hyeon Woo PARK, Du Won Lee, Myung Ho Lee, Myung Geun Song | 2021-10-19 |
| 10982144 | Silicon nitride layer etching composition and etching method using the same | Dong Hyun Kim, Hyeon Woo PARK, Tae Ho Kim, Myung Ho Lee, Myung Geun Song | 2021-04-20 |
| 10920142 | Polysiloxane-based compound, silicon nitride layer etching composition including the same | Dong Hyun Kim, Hyeon Woo PARK, Du Won Lee, Myung Ho Lee | 2021-02-16 |