Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6422085 | Flush-diaphragm relative pressure sensor | Frank Hegner, Andreas Rossberg, Elke Schmidt | 2002-07-23 |
| 6374680 | Capacitive pressure sensor or capacitive differential pressure sensor | Andreas Rossberg, Elke Schmidt, Frank Hegner, Thomas Velten | 2002-04-23 |
| 6267009 | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same | Elke Schmidt, Andreas Rossberg, Frank Hegner, Thomas Velten | 2001-07-31 |
| 5750899 | Capacitive pressure sensor with sensing element mechanically isolated from the casing | Frank Hegner, Elke Schmidt, Rainer Martin | 1998-05-12 |
| 5400489 | Method of stabilizing the surface properties of objects to be thermally treated in a vacuum | Frank Hegner | 1995-03-28 |