Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9010384 | Load port | Takehiko Yoshimura, Tatsuhiko Nagata, Masaru Seki | 2015-04-21 |
| 8253251 | Method for producing low-k film, semiconductor device, and method for manufacturing the same | Takamaro Kikkawa | 2012-08-28 |
| 8030221 | Method for producing low-k l film, semiconductor device, and method for manufacturing the same | Takamaro Kikkawa | 2011-10-04 |