Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304340 | Method for manufacturing stacked contact plugs | — | 2012-11-06 |
| 7656693 | Semiconductor device and manufacturing method thereof | Yoshitaka Nakamura | 2010-02-02 |
| 6214725 | Etching method | — | 2001-04-10 |