Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131135 | Imprint apparatus and imprint method | Yasuo Matsuoka, Hiroshi Nomura | 2018-11-20 |
| 8124303 | Phase shift mask and method for manufacturing the same, and method for manufacturing integrated circuit | — | 2012-02-28 |
| 8090188 | Apparatus including defect correcting system which repeats a correcting of a reticle pattern defect and a correcting method using the apparatus | — | 2012-01-03 |
| 7922960 | Fine resist pattern forming method and nanoimprint mold structure | — | 2011-04-12 |
| 7776495 | Semiconductor device and manufacturing method thereof | Takashi Nishida | 2010-08-17 |
| 7714308 | Variable shaped electron beam lithography system and method for manufacturing substrate | — | 2010-05-11 |
| 7438998 | Method of manufacturing semiconductor device | — | 2008-10-21 |
| 7208788 | Semiconductor device and manufacturing method thereof | Takashi Nishida | 2007-04-24 |
| 6022797 | Method of manufacturing through holes in a semiconductor device | Shigeo Ogasawara, Shigeru Takahashi, Noriaki Oka, Tadayasu Miki | 2000-02-08 |