Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009020 | Vacuum pumps and methods of manufacturing the same | Luis Fernando Velásquez-García | 2021-05-18 |
| 8636019 | In-situ removal of semiconductor process residues from dry pump surfaces | — | 2014-01-28 |