Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8382909 | Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system | — | 2013-02-26 |
| 7638106 | Method of treating a gas stream | Christopher Mark Bailey, Michael Andrew Galtry, David Engerran, Andrew James Seeley, Geoffrey Young +2 more | 2009-12-29 |
| 5928426 | Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors | — | 1999-07-27 |