| 9593931 |
Palladium coating thickness measurement |
D. Morgan Tench, Michael Pavlov, Eugene Shalyt, Vladimir Dozortsev |
2017-03-14 |
| 9274079 |
Etchant product analysis in alkaline etchant solutions |
Eugene Shalyt, Guang Liang |
2016-03-01 |
| 8535504 |
Analysis of an auxiliary leveler additive in an acid copper plating bath |
Michael Pavlov, Eugene Shalyt, Isaak Tsimberg |
2013-09-17 |
| 8142640 |
Chloride analysis in acid copper plating baths |
Michael Pavlov, Eugene Shalyt |
2012-03-27 |
| 8118988 |
Analysis of copper ion and complexing agent in copper plating baths |
Eugene Shalyt, Victor Ososkov, Michael Pavlov |
2012-02-21 |
| 8008087 |
Analysis of silicon concentration in phosphoric acid etchant solutions |
Eugene Shalyt, Julia Tyutina |
2011-08-30 |
| 7932094 |
Method and apparatus for determining the stability of an electroless plating bath |
Eugene Shalyt, Semyon Aleynik |
2011-04-26 |
| 7879222 |
Detection of additive breakdown products in acid copper plating baths |
Eugene Shalyt, Michael Pavlov |
2011-02-01 |
| 7291253 |
Detection of an unstable additive breakdown product in a plating bath |
Michael Pavlov, Eugene Shalyt |
2007-11-06 |
| 7186326 |
Efficient analysis of organic additives in an acid copper plating bath |
Eugene Shalyt, Michael Pavlov, Alex Kogan, Michael James Perpich |
2007-03-06 |
| 6890758 |
Measurement of complexing agent concentration in an electroless plating bath |
Eugene Shalyt, Michael Pavlov, Alex Kogan, Michael James Perpich |
2005-05-10 |
| 6749739 |
Detection of suppressor breakdown contaminants in a plating bath |
Gene Chalyt, Michael Pavlov, Alex Kogan, Michael James Perpich |
2004-06-15 |
| 6733656 |
Voltammetric reference electrode calibration |
Gene Chalyt, Michael Pavlov, Alex Kogan, Michael James Perpich |
2004-05-11 |
| 6709561 |
Measurement of the concentration of a reducing agent in an electroless plating bath |
Michael Pavlov, Gene Chalyt, Alex Kogan, Michael James Perpich |
2004-03-23 |
| 6673226 |
Voltammetric measurement of halide ion concentration |
Alex Kogan, Eugene Shalyt, Michael Pavlov, Michael James Perpich |
2004-01-06 |
| 6572753 |
Method for analysis of three organic additives in an acid copper plating bath |
Gene Chalyt, Michael Pavlov, Alex Kogan, Michael James Perpich |
2003-06-03 |