Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030092 | Substrate cleaning method and substrate cleaning apparatus | Kenji Kodera, Keisuke Uchiyama, Satoru Yamamoto | 2024-07-09 |
| 11667008 | Substrate processing apparatus and substrate processing method | — | 2023-06-06 |