Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394609 | Product removal apparatus, treatment system, and product removal method | — | 2025-08-19 |
| 12094731 | Substrate drying apparatus | Hirotaka Ohashi, Takuya Tsushima | 2024-09-17 |
| 10960426 | Development processing device | Minoru Sugiyama, Mitsuru Asano | 2021-03-30 |
| 9927760 | Development processing device | Minoru Sugiyama, Mitsuru Asano | 2018-03-27 |