Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5513499 | Method and apparatus for cryopump regeneration using turbomolecular pump | — | 1996-05-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5513499 | Method and apparatus for cryopump regeneration using turbomolecular pump | — | 1996-05-07 |