Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941006 | Method and system for calibrating the scan amplitude of an electron beam lithography instrument | Michael Penberth, Adam Woolfe | 2005-09-06 |
| 6288406 | Electron beam lithography system having variable writing speed | Michael Penberth, Adam Woolfe | 2001-09-11 |
| 6278124 | Electron beam blanking method and system for electron beam lithographic processing | Michael Penberth, Adam Woolfe | 2001-08-21 |
| 4587425 | Electron beam apparatus and electron collectors therefor | — | 1986-05-06 |
| 4242671 | Transponders | — | 1980-12-30 |