Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148190 | Semiconductor device and method of manufacturing the same | — | 2012-04-03 |
| 7923324 | Method for manufacturing capacitor of semiconductor device | — | 2011-04-12 |
| 7540918 | Atomic layer deposition equipment and method | — | 2009-06-02 |
| 6982341 | Volatile copper aminoalkoxide complex and deposition of copper thin film using same | Yunsoo KIM, Chang-Gyoun Kim, Taek-Mo Chung, Sun-Sook Lee, Ki-Seok An +1 more | 2006-01-03 |