Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485577 | Method of forming metal line stacking structure in semiconductor device | — | 2009-02-03 |
| 7397122 | Metal wiring for semiconductor device and method for forming the same | — | 2008-07-08 |
| 7368749 | Method of detecting misalignment of ion implantation area | — | 2008-05-06 |
| 7312147 | Method of forming barrier metal in semiconductor device | — | 2007-12-25 |
| 7256133 | Method of manufacturing a semiconductor device | — | 2007-08-14 |
| 7220623 | Method for manufacturing silicide and semiconductor with the silicide | — | 2007-05-22 |
| 7148132 | Manufacturing method of semiconductor device | — | 2006-12-12 |
| 7141880 | Metal line stacking structure in semiconductor device and formation method thereof | — | 2006-11-28 |
| 7122387 | Deposition stop time detection apparatus and methods for fabricating copper wiring using the same | — | 2006-10-17 |
| 7122388 | Method of detecting misalignment of ion implantation area | — | 2006-10-17 |
| 7060603 | Methods of forming metal wiring of semiconductor devices including sintering the wiring layers and forming a via hole with a barrier metal | Dong-Ki Jeon | 2006-06-13 |
| 7030021 | Method of fabricating metal interconnection of semiconductor device | — | 2006-04-18 |
| 6923710 | Apparatus and method for chemical mechanical polishing process | — | 2005-08-02 |
| 6903026 | Sputter etch methods | — | 2005-06-07 |
| 6821877 | Method of fabricating metal interconnection of semiconductor device | — | 2004-11-23 |
| 6207562 | Method of forming titanium silicide | — | 2001-03-27 |
| 6132081 | Method for calibrating optical sensor used to measure the temperature of a substrate during rapid thermal process | — | 2000-10-17 |