| 7470969 |
Semiconductor device and fabrication method thereof |
— |
2008-12-30 |
| 7354834 |
Semiconductor devices and methods to form trenches in semiconductor devices |
— |
2008-04-08 |
| 7348247 |
Semiconductor devices and methods of manufacturing the same |
— |
2008-03-25 |
| 7307024 |
Flash memory and fabrication method thereof |
— |
2007-12-11 |
| 7217633 |
Methods for fabricating an STI film of a semiconductor device |
— |
2007-05-15 |
| 7199012 |
Method of forming a trench in a semiconductor device |
— |
2007-04-03 |
| 7199041 |
Methods for fabricating an interlayer dielectric layer of a semiconductor device |
— |
2007-04-03 |
| 7164173 |
Method for manufacturing MOS transistor and semiconductor device employing MOS transistor made using the same |
— |
2007-01-16 |
| 7122440 |
Semiconductor device and fabrication method thereof |
— |
2006-10-17 |
| 7091076 |
Method for fabricating semiconductor device having first and second gate electrodes |
— |
2006-08-15 |
| 7037858 |
Method for manufacturing semiconductor device including an ozone process |
— |
2006-05-02 |
| 7029998 |
Formation method of gate electrode in a semiconductor process |
— |
2006-04-18 |
| 6946374 |
Methods of manufacturing flash memory semiconductor devices |
— |
2005-09-20 |
| 6902968 |
Method for manufacturing a MOS transistor that prevents contact spiking and semiconductor device employing a MOS transistor made using the same |
— |
2005-06-07 |
| 6841471 |
Fabrication method of semiconductor device |
— |
2005-01-11 |
| 6794702 |
Semiconductor device and fabrication method thereof |
— |
2004-09-21 |