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Method for fabricating a metal interconnection using a dual damascene process and resulting semiconductor device |
— |
2011-09-06 |
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Method for manufacturing shallow trench isolation layer of semiconductor device |
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2011-07-19 |
| 7566658 |
Method for fabricating a metal interconnection using a dual damascene process and resulting semiconductor device |
— |
2009-07-28 |
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Semiconductor device and method of manufacturing the same |
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2009-06-16 |
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Method for fabricating silicide layers for semiconductor device |
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2008-11-04 |
| 7306987 |
Capacitor and method for fabricating the same |
Chee Hong Choi |
2007-12-11 |
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Methods for fabricating a copper interconnect |
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2007-07-24 |
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Method for forming dual damascene pattern |
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2007-02-20 |
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Methods of fabricating semiconductor devices |
Chang Hun Han |
2006-11-14 |
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Method of fabricating interconnection structure of semiconductor device |
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2006-09-26 |
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Method of forming damascene pattern in a semiconductor device |
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2006-06-27 |
| 5796649 |
Dynamic random access memory capacitor and method for fabricating the same |
Cheol Soo Park, Eui K. Ryou |
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Method of fabricating a dynamic random access memory stacked capacitor |
Cheol Soo Park, Eui K. Ryou |
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Method for fabricating dynamic random access memory capacitor |
Cheoul S. Park |
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Method for the fabrication of dynamic random access memory capacitor |
Cheol Soo Park |
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