Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10989564 | Transfer equipment for a vacuum chamber | — | 2021-04-27 |
| 9417633 | System for compensating dynamic and thermal deformity errors of linear motion single-plane gantry stage in real time, stage apparatus, manufacturing thereof, and measuring and inspection equipment | Byoung Gwan Ko, Banik Rahul, Soo Keun Shin, Chul Jung, Yonk Uk Kwon | 2016-08-16 |