Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12304024 | Polishing tool | Naruto Fuwa | 2025-05-20 |
| 10157802 | Workpiece evaluating method | Seiji Harada | 2018-12-18 |
| 10068811 | Method of evaluating gettering property | Ryohei YOKOTA, Naruto Fuwa | 2018-09-04 |
| 9679820 | Evaluation method of device wafer | Seiji Harada | 2017-06-13 |
| 7731567 | Semiconductor wafer processing method | Shinnosuke Sekiya, Setsuo Yamamoto, Naruto Fuwa | 2010-06-08 |