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Multiple layer electrode transducers |
Hoyoun Jang, Stephane Leahy, Bruce H. Diamond, Sahil Gupta |
2024-11-12 |
| 11697582 |
MEMS transducer |
Stephane Leahy, Mohsin Nawaz, Carly Stalder, Sahil Gupta, Meysam Daeichin |
2023-07-11 |
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Multiple coil spring MEMS resonator |
John Ryan Clark |
2018-01-09 |
| 9490769 |
Vertical differential resonator |
Guohong He, John Ryan Clark |
2016-11-08 |
| 9431993 |
Temperature compensated resonator with a pair of spaced apart internal dielectric layers |
John Ryan Clark |
2016-08-30 |
| 8878633 |
Vertical differential resonator |
Guohong He, John Ryan Clark |
2014-11-04 |
| 8686802 |
Bias voltage tuning of MEMS resonator operation point |
Andrew R. Brown, John Ryan Clark, Graham Y. Mostyn, William Cochrane Ingle |
2014-04-01 |
| 8193869 |
Feedthrough capacitance compensation for resonant devices |
Andrew R. Brown, Kenneth R. Cioffi |
2012-06-05 |
| 7812680 |
MEMS resonator-based signal modulation |
Andrew R. Brown, Kenneth R. Cioffi, Didier Lacroix |
2010-10-12 |
| 7804374 |
Feedthrough capacitance compensation for resonant devices |
Andrew R. Brown, Kenneth R. Cioffi |
2010-09-28 |
| 7679466 |
Counter-based resonator frequency compensation |
Kenneth R. Cioffi, Michael J. Simoneau, Didier Lacroix |
2010-03-16 |
| 7307496 |
Method and apparatus for frequency tuning of a micro-mechanical resonator |
Xiangxiang Huang, James D. MacDonald, Jr. |
2007-12-11 |
| 7170369 |
Method for frequency tuning of a micro-mechanical resonator |
Xiangxiang Huang, James D. MacDonald, Jr. |
2007-01-30 |
| 7068126 |
Method and apparatus for frequency tuning of a micro-mechanical resonator |
Xiangxiang Huang, James D. MacDonald, Jr. |
2006-06-27 |
| 6958566 |
Mechanical resonator device having phenomena-dependent electrical stiffness |
Clark T.-C. Nguyen |
2005-10-25 |
| 6930569 |
Micromechanical resonator having short support beams |
— |
2005-08-16 |
| 6846691 |
Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
John Ryan Clark, Clark T.-C. Nguyen |
2005-01-25 |
| 6739190 |
Micromechanical resonator device |
Clark T.-C. Nguyen |
2004-05-25 |