| 12293906 |
Mn—Ta—W—Cu—O-based sputtering target, and production method therefor |
— |
2025-05-06 |
| 11827971 |
Sputtering target |
— |
2023-11-28 |
| 11225709 |
Mn—Zn—O sputtering target and production method therefor |
Junichi Sugawara |
2022-01-18 |
| 10886112 |
Mn—Zn—W—O sputtering target and production method therefor |
Junichi Sugawara, Fusashige Tokutake |
2021-01-05 |
| 10811237 |
Mn—Zn—O sputtering target and production method therefor |
Junichi Sugawara |
2020-10-20 |
| 10069066 |
Target, method for producing the same, memory, and method for producing the same |
Kazuhiro Ohba, Hitoshi Kimura |
2018-09-04 |
| 9419214 |
Target, method for producing the same, memory, and method for producing the same |
Kazuhiro Ohba, Hitoshi Kimura |
2016-08-16 |
| 8182722 |
Methods for manufacturing zinc oxide base sputtering target and transparent electrically conductive film |
Shina Kirita, Toshitaka Kawashima, Takahiro Nagata |
2012-05-22 |