Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7165669 | Method and device for carrying out working steps on miniaturized modules | — | 2007-01-23 |
| 7166806 | Micro-functional unit | Marcus Scholl | 2007-01-23 |
| 6980364 | Projector lens | Guenter Herr, Andreas Rose, Hans Theis, Artur Wojt | 2005-12-27 |
| 6596115 | Method and device for carrying out working steps on miniaturized modules | — | 2003-07-22 |
| 6521068 | Method and device for detaching a segment of a material layer | Ralf Baehnisch, Bernd Huettner | 2003-02-18 |
| 6080957 | Micromechanical tool | Juergen Staud | 2000-06-27 |