Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379094 | Contamination control method of vapor deposition apparatus and method of producing epitaxial silicon wafer | — | 2019-08-13 |
| 9034721 | Method for manufacturing semiconductor substrate | Tomonori Yamaoka, Shoichi Yamauchi, Nobuhiro Tsuji, Toshiyuki Morishita | 2015-05-19 |
| 8956947 | Method for manufacturing semiconductor substrate | Tomonori Yamaoka, Shoichi Yamauchi, Nobuhiro Tsuji, Toshiyuki Morishita | 2015-02-17 |
| 8835276 | Method for manufacturing semiconductor substrate | Tomonori Yamaoka, Shoichi Yamauchi, Nobuhiro Tsuji, Toshiyuki Morishita | 2014-09-16 |
| 8501598 | Semiconductor substrate, semiconductor device, and method of producing semiconductor substrate | Hitoshi Goto, Takumi Shibata, Tsuyoshi Yamamoto | 2013-08-06 |
| RE44236 | Method for manufacturing semiconductor device | Shoichi Yamauchi, Hitoshi Yamaguchi, Tomoatsu Makino, Tomonori Yamaoka | 2013-05-21 |
| 8097511 | Semiconductor device having P-N column layer and method for manufacturing the same | Takumi Shibata, Shouichi Yamauchi, Tomonori Yamaoka | 2012-01-17 |
| 7811907 | Method for manufacturing semiconductor device and epitaxial growth equipment | Takumi Shibata, Shoichi Yamauchi, Tomonori Yamaoka | 2010-10-12 |
| 7776710 | Manufacturing method of semiconductor wafer having a trench structure and epitaxial layer | Yukichi Horioka, Shoichi Yamauchi | 2010-08-17 |
| 7642178 | Semiconductor device, method for manufacturing the same and method for evaluating the same | Shoichi Yamauchi, Takumi Shibata, Tomonori Yamaoka | 2010-01-05 |
| 7601603 | Method for manufacturing semiconductor device | Shoichi Yamauchi, Hitoshi Yamaguchi, Tomoatsu Makino, Tomonori Yamaoka | 2009-10-13 |
| 7364980 | Manufacturing method of semiconductor substrate | Tomonori Yamaoka, Shoichi Yamauchi, Hitoshi Yamaguchi, Takumi Shibata | 2008-04-29 |