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Seed crystal for SiC single-crystal growth, SiC single crystal, and method of manufacturing the SiC single crystal |
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SiC single crystal, SiC wafer, and semiconductor device |
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Manufacturing method of silicon carbide single crystal |
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SiC single crystal, production method therefor, SiC wafer and semiconductor device |
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Manufacturing method of silicon carbide single crystal |
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SiC single crystal, SiC wafer, and semiconductor device |
Yasushi Urakami, Ayumu Adachi |
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Method of manufacturing homogeneous silicon carbide single crystal with low potential of generating defects |
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Method for manufacturing silicon carbide single crystal from dislocation control seed crystal |
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