Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5241369 | Two-dimensional optical scatterometer apparatus and process | John R. McNeil | 1993-08-31 |
| 4877479 | Method and apparatus for ion deposition and etching | John R. McNeil | 1989-10-31 |
| 4758304 | Method and apparatus for ion etching and deposition | John R. McNeil | 1988-07-19 |