Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10442686 | Method for manufacturing a hollow MEMS structure | Hoa Thanh Le, Karen Birkelund, Anders Michael Jorgensen, Flemming JENSEN | 2019-10-15 |
| 8790863 | Electron beam processing with condensed ice | Daniel Branton, Jene A. Golovchenko | 2014-07-29 |