Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7365016 | Anhydrous HF release of process for MEMS devices | Luc Ouellet, Jun Li | 2008-04-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7365016 | Anhydrous HF release of process for MEMS devices | Luc Ouellet, Jun Li | 2008-04-29 |