Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394592 | Method for enhancing discharge in magnetized capacitively coupled radio frequency (CCRF) discharge reactor | Quanzhi Zhang, Jingyu SUN, Yuqing Guo | 2025-08-19 |
| 11758641 | Power supply system for improving plasma uniformity and method thereof | Kai Zhao, Zixuan Su, Yongxin Liu | 2023-09-12 |
| 11530955 | Method for measuring gas temperature in plasma | Daoman Han, Yongxin Liu, Fei Gao, Zigeng Liu, Zhenguo Jing | 2022-12-20 |
| 11324104 | Magnetic probe device | Kai Zhao, Yongxin Liu | 2022-05-03 |
| 10204758 | Positive and negative ion source based on radio-frequency inductively coupled discharge | Fei Gao | 2019-02-12 |