Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11283981 | Image acquisition device, image acquisition method and inspection apparatus | — | 2022-03-22 |
| 11060856 | Misalignment detection device and misalignment detection method | — | 2021-07-13 |
| 10613037 | Inspection apparatus and inspection method | Yasushi Nagata | 2020-04-07 |
| 7440605 | Defect inspection apparatus, defect inspection method and program | Hiroyuki Onishi | 2008-10-21 |
| 7436993 | Apparatus and method for detecting defects in periodic pattern on object | Hiroyuki Onishi | 2008-10-14 |
| 7024041 | Pattern inspection apparatus and method | — | 2006-04-04 |