Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7413628 | Substrate treatment method and substrate treatment apparatus | Masaharu Kimura, Takashi Hara | 2008-08-19 |
| 7241362 | Substrate treatment method and substrate treatment apparatus | Masaharu Kimura, Takashi Hara | 2007-07-10 |
| 7018555 | Substrate treatment method and substrate treatment apparatus | Masaharu Kimura, Yasuhiro Kurata, Takashi Hara | 2006-03-28 |