Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8157496 | Substrate processing apparatus and substrate transfer method | Takashi Hara | 2012-04-17 |
| 7513263 | Substrate holding device and substrate processing apparatus | — | 2009-04-07 |
| 7407363 | Substrate transport apparatus and substrate transport method | — | 2008-08-05 |
| 7354481 | Substrate holding and rotating apparatus | Takeshi Yoshida | 2008-04-08 |