Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4686168 | Fluoroalkyl acrylate resist material and process for forming fine resist pattern | Tsuneo Fujii, Hiroshi Inukai, Takayuki Deguchi, Toshihiko Amano, Hiroshi Asakawa +1 more | 1987-08-11 |
| 4539250 | Resist material and process for forming fine resist pattern | Tsuneo Fujii, Hiroshi Inukai, Takayuki Deguchi, Toshihiko Amano, Hiroshi Asakawa +1 more | 1985-09-03 |