Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7078334 | In situ hard mask approach for self-aligned contact etch | Saurabh Dutta Chowdhury, Mehran Sedigh, Chan-Lon Yang | 2006-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7078334 | In situ hard mask approach for self-aligned contact etch | Saurabh Dutta Chowdhury, Mehran Sedigh, Chan-Lon Yang | 2006-07-18 |