Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753944 | Technique for characterizing the performance of an object positioning apparatus | — | 2004-06-22 |
| 6430464 | Stepper alignment process | Edmund M. Couillard, Peter J. Sullivan | 2002-08-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753944 | Technique for characterizing the performance of an object positioning apparatus | — | 2004-06-22 |
| 6430464 | Stepper alignment process | Edmund M. Couillard, Peter J. Sullivan | 2002-08-06 |