Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431241 | Method for manufacturing a silicon nitride thin film using plasma-enhanced chemical vapor deposition | — | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431241 | Method for manufacturing a silicon nitride thin film using plasma-enhanced chemical vapor deposition | — | 2016-08-30 |