Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10301175 | Method for manufacturing MEMS double-layer suspension microstructure, and MEMS infrared detector | — | 2019-05-28 |
| 10093536 | MEMS double-layer suspension microstructure manufacturing method, and MEMS infrared detector | — | 2018-10-09 |
| 9902613 | Positioning method in microprocessing process of bulk silicon | — | 2018-02-27 |
| 9862595 | Method for manufacturing thin-film support beam | — | 2018-01-09 |
| 9834437 | Method for manufacturing MEMS torsional electrostatic actuator | — | 2017-12-05 |