Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728472 | Method for wafer etching in deep silicon trench etching process | Xiaoming Li | 2017-08-08 |
| 9431308 | Critical size compensating method of deep groove etching process | Xiaoming Li | 2016-08-30 |
| 8135713 | Sourcing controller | Simon Chen, Fred F. Chen, Tian Xu, Jay Xiong | 2012-03-13 |