Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748666 | Head module, large-scale container and method for manufacturing the both | Jun Li, Guobiao Wang, Zhongwei Yang, Honghui Ge, Shenhui Zhai +5 more | 2020-08-18 |
| 10071751 | Mounting structure for equipment compartment bottom plate | Wenmin Yu, Zhaohua Wang, Shuhai Li, Yonglin Shan, Zhicheng Guo +4 more | 2018-09-11 |
| 7618837 | Method for fabricating high aspect ratio MEMS device with integrated circuit on the same substrate using post-CMOS process | Yong Zhu, Jie Fan, Xuesong Liu, Jian Zhou, Yangyuan Wang | 2009-11-17 |