Issued Patents All Time
Showing 151–175 of 190 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8206804 | Phase change memory materials | Bruce Gardiner Aitken | 2012-06-26 |
| 8176752 | Silica glass with saturated induced absorption and method of making | Susan Lee Schiefelbein | 2012-05-15 |
| 8153241 | Wide-angle highly reflective mirrors at 193NM | Horst Schreiber, Jue Wang | 2012-04-10 |
| 7964522 | F-doped silica glass and process of making same | Lisa Anne Moore | 2011-06-21 |
| 7928026 | Synthetic silica material with low fluence-dependent-transmission and method of making the same | Dana Craig Bookbinder, Kenneth Edward Hrdina, Glenn Eric Kohnke, Lisa Anne Moore, Susan Lee Schiefelbein +1 more | 2011-04-19 |
| 7906446 | Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same | Douglas Clippinger Allan, Dana Craig Bookbinder, Ulrich Wilhelm Heinz Neukirch | 2011-03-15 |
| 7903351 | Active cooling of crystal optics for increased laser lifetime | Colleen Renee Clar, William Rogers Rosch, Horst Schreiber | 2011-03-08 |
| 7829489 | Low CTE photomachinable glass | Nicholas Francis Borrelli, Kathryn L Goetschius, David L. Morse | 2010-11-09 |
| 7799711 | Photomachinable glass compositions having tunable photosensitivity | Nicholas Francis Borrelli, Kathryn L Goetschius | 2010-09-21 |
| 7589039 | Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same | Douglas Clippinger Allan, Dana Craig Bookbinder, Ulrich Wilhelm Heinz Neukirch | 2009-09-15 |
| 7463806 | Methods of generating and transporting short wavelength radiation and apparati used therein | Nicholas Francis Borrelli, John H. Bruning, Douglas S. Goodman, Karl William Koch, III, Dirk Mueller +2 more | 2008-12-09 |
| 7265070 | Synthetic silica glass optical material having high resistance to optically induced index change | Heather Debra Boek, Christine E. Heckle, Johannes Moll | 2007-09-04 |
| 6982232 | Photolithography methods and systems | Nicholas Francis Borrelli, Johannes Moll | 2006-01-03 |
| 6977137 | Direct writing of optical devices in silica-based glass using femtosecond pulse lasers | Nicholas Francis Borrelli, Joseph Francis Schroeder, III, Alexander Mikhailovich Streltsov | 2005-12-20 |
| 6915665 | Method of inducing transmission in optical lithography preforms | Nicholas Francis Borrelli, Paul Stephen Danielson, Michael Heslin, Stephan Lvovich Logunov, Johannes Moll +1 more | 2005-07-12 |
| 6844277 | UV photosensitive melted glasses | Nicholas Francis Borrelli, George B. Hares | 2005-01-18 |
| 6833949 | Film coated optical lithography elements and method of making | Robert Maier, Lisa Anne Moore | 2004-12-21 |
| 6828262 | UV photosensitive melted glasses | Nicholas Francis Borrelli, George B. Hares | 2004-12-07 |
| 6806039 | Photolithographic element blank calcium strontium fluoride UV transmitting mixed fluoride crystal with minimized spatial dispersion | Douglas Clippinger Allan, Nicholas Francis Borrelli, Robert W. Sparrow | 2004-10-19 |
| 6801562 | High repetition rate excimer laser system | Michael Pell, Robert W. Sparrow, Paul Michael Then | 2004-10-05 |
| 6796148 | Deep UV laser internally induced densification in silica glasses | Nicholas Francis Borrelli, Douglas Clippinger Allan | 2004-09-28 |
| 6782716 | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass | Lisa Anne Moore | 2004-08-31 |
| 6765717 | Preferred crystal orientation optical elements from cubic materials | Douglas Clippinger Allan, Nicholas Francis Borrelli, Bryan D. Stone | 2004-07-20 |
| 6754002 | Photolithography methods and systems | Nicholas Francis Borrelli, Johannes Moll | 2004-06-22 |
| 6682859 | Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass | Lisa Anne Moore | 2004-01-27 |