Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5102776 | Method and apparatus for microlithography using x-pinch x-ray source | David Hammer, Nian-Sheng Qi | 1992-04-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5102776 | Method and apparatus for microlithography using x-pinch x-ray source | David Hammer, Nian-Sheng Qi | 1992-04-07 |