Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6156171 | Sputtering magnetron | Dennis R. Hollars, Delbert F. Waltrip, Robert B. Zubeck, Robert M. Smith, Gary L. Payne | 2000-12-05 |
| 5972184 | Heating system for high throughput sputtering | Dennis R. Hollars, Delbert F. Waltrip, Robert B. Zubeck, Robert M. Smith, Gary L. Payne | 1999-10-26 |
| 5814196 | Apparatus and method for high throughput sputtering | Dennis R. Hollars, Delbert F. Waltrip, Robert B. Zubeck, Robert M. Smith, Gary L. Payne | 1998-09-29 |
| 5683561 | Apparatus and method for high throughput sputtering | Dennis R. Hollars, Delbert F. Waltrip, Robert B. Zubeck, Robert M. Smith, Gary L. Payne +2 more | 1997-11-04 |