Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365056 | Method for producing a suspended element in a micro-machined structure | Philippe Robert, Hubert Grange | 2002-04-02 |
| 5750420 | Method for manufacturing a structure with a useful layer held at a distance from a substrate by abutments, and for detaching such a layer | Hubert Bono, Patrice Rey | 1998-05-12 |
| 5495761 | Integrated accelerometer with a sensitive axis parallel to the substrate | Bernard Diem | 1996-03-05 |
| 4653326 | Directional accelerometer and its microlithographic fabrication process | Jean-Sebastien Danel, Gilles Delapierre | 1987-03-31 |