Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818533 | Wafer centering device for measurement apparatus | Gyu-Seong Lee, Hye-Suk Jung | 2020-10-27 |
| 7736918 | Photoresist coating apparatus having nozzle monitoring unit and method for supplying photoresist using the same | Young Joon SEO | 2010-06-15 |