Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7705332 | Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometry | Mario C. Marconi, Carmen S. Menoni, Jorge J. Rocca | 2010-04-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7705332 | Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometry | Mario C. Marconi, Carmen S. Menoni, Jorge J. Rocca | 2010-04-27 |