Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5897844 | Photon-enhanced neutral beam etcher and cleaner | Bert Van Zyl | 1999-04-27 |
| 5637188 | Processing substrates with a photon-enhanced neutral beam | Bert Van Zyl | 1997-06-10 |