Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10821555 | Method and device for the laser-based working of two-dimensional, crystalline substrates, in particular semiconductor substrates | Rico Bohme | 2020-11-03 |
| 6540842 | Method for in-situ cleaning of a gas scrubber | Kye-Jin Lim, Gwon Sagong | 2003-04-01 |
| 6521192 | Rejuvenable ambient temperature purifier | Giorgio Vergani | 2003-02-18 |
| 6450682 | Method and apparatus for predicting the end of life of a gas scrubber | Kye-Jin Lim, Gwon Sagong | 2002-09-17 |
| 5007992 | Method and apparatus for removing oxygen from a semiconductor processing reactor | — | 1991-04-16 |