Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Tsuyoshi Ikehara | National Institute Of Advanced Industrial Science And Technology | 6 |
| 2 | Toshinari Kinjo | Shin-Etsu Handotai Co. | 1 |
| 2 | Kenji Iha | Shin-Etsu Handotai Co. | 1 |
| 2 | Fukiko Shinjyo | — | 1 |
| 2 | Teruyuki Takara | — | 1 |