Showing 1–10 of 10 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | John W. Burke, Jr. | Axcelis Technologies | 11 |
| 2 | Thomas N. Kuss | — | 3 |
| 3 | Donald L. Horne | — | 2 |
| #4 | Sammy K. Wallen | — | 1 |
| #4 | Charlene Justice | — | 1 |
| #4 | James C. Sparks | — | 1 |
| #4 | Donald L. Horn | — | 1 |
| #4 | Jessica R. Amburgey | — | 1 |
| #4 | Keven L. Amburgey | — | 1 |
| #4 | Paul Aiken | — | 1 |
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