Showing 1–7 of 7 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | James J. Hunter | Asml Netherlands B.V. | 3 |
| 2 | Harry L. Decker | — | 2 |
| 2 | Dana Smith | — | 2 |
| 2 | Richard J. Hile | — | 2 |
| #5 | Daniel Hattabaugh | — | 1 |
| #5 | Timothy Hubbell | — | 1 |
| #5 | Derik Losinger | — | 1 |
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